Semiconductor R&D Labs

SSOE was selected by a leading semiconductor manufacturer to scope and design a new flagship high-rise office and research facility at one of their campuses. The project included the design of state-of-the-art research and development (R&D) laboratory spaces to develop new technologies.

At 19,850 SF, the labs are overall not clean spaces, though they will house select semiconductor manufacturing tools. The spaces needed to meet material delivery, vibration, and interference requirements similar to a Fab; attention to detail was paramount. A vibration subconsultant was engaged to ensure the designed structure would meet the exacting standards necessary for semiconductor design. Likewise, electromagnetic interference (EMI) was a critical consideration, dictating the strategic placement of the lab within the building to protect the equipment from WiFi or other EMI sources located in other areas. Telecom restrictions also played a significant role, with careful planning and material selection to provide needed connectivity without compromising sensitive equipment.

To meet ongoing needs, the client wanted a space that could be reconfigured with new tools as needed. SSOE delivered a design with access, structure, and move in / move out pads needed for easy movement of tools and equipment. This adaptability is further enhanced by the management of liquids and gases, including equipment feeds equipped with monitored drip trays and bottle-fed gas systems fed from the main Fab laterals.

The project’s Design-Build approach leveraged early collaboration between the design team and the contractor. Combined with comprehensive project communication processes, this partnership ensured efficiency and constructability across project changes.